| Plasma Uniformity of Inductively Coupled Plasma Reactor with Helical Heating Coil | |
|---|---|
| Author | Bong koo Kang, Jong Chul Park, and Young Hwan Kim |
| Journal | IEEE Transactions on Plasma Science |
| Impact factor | Vol. 29, No. 2, pp. 383-387 |
| Year | Apr. 2001 |
| Category | |
| Link |
http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=922750
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